Inventor
SHRIYAN SAMEET K
US8 patents
⚠️ This page may combine multiple inventors who share the name “SHRIYAN SAMEET K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10018579B1Jul 10, 2018
System and method for cathodoluminescence-based semiconductor wafer defect inspection
KLA TENCOR CORP6 citations69
US10340114B1Jul 2, 2019
Method of eliminating thermally induced beam drift in an electron beam separator
KLA TENCOR CORP0 citations43
US10224177B2Mar 5, 2019
Method and system for aberration correction in an electron beam system
KLA TENCOR CORP0 citations40