Inventor
GIRIDHAR RAGUPATHY V
US3 patents
Patents
3 patentsUS5171703ADec 15, 1992
Device and substrate orientation for defect reduction and transistor length and width increase
INTEL CORP39 citations89
US5139971AAug 18, 1992
Anneal to decrease moisture absorbance of intermetal dielectrics
INTEL CORP50 citations89
US5389581AFeb 14, 1995
High density TEOS-based film for intermetal dielectrics
INTEL CORP15 citations67