Inventor
COULTAS DENNIS K
US10 patents
Patents
10 patentsUS5304279AApr 19, 1994
Radio frequency induction/multipole plasma processing tool
IBM252 citations98
US5206516AApr 27, 1993
Low energy, steered ion beam deposition system having high current at low pressure
IBM172 citations98
US6051151AApr 18, 2000
Apparatus and method of producing a negative ion plasma
IBM77 citations96
US5241245AAug 31, 1993
Optimized helical resonator for plasma processing
IBM158 citations96
US5207437AMay 4, 1993
Ceramic electrostatic wafer chuck
IBM57 citations96
US5433258AJul 18, 1995
Gettering of particles during plasma processing
IBM15 citations82
US5332441AJul 26, 1994
Apparatus for gettering of particles during plasma processing
IBM17 citations82
US5543184AAug 6, 1996
Method of reducing particulates in a plasma tool through steady state flows
IBM10 citations73
US5518547AMay 21, 1996
Method and apparatus for reducing particulates in a plasma tool through steady state flows
IBM15 citations73
US6028394AFeb 22, 2000
Cold electron plasma reactive ion etching using a rotating electromagnetic filter
IBM6 citations62