Inventor
HENRICH JUERGEN
DE13 patents
⚠️ This page may combine multiple inventors who share the name “HENRICH JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD SYSTEMS GMBH
6 patentsUS6196154B1Mar 6, 2001
Air lock for introducing substrates to and/or removing them from a treatment chamber
LEYBOLD SYSTEMS GMBH32 citations90
US6132562AOct 17, 2000
Method and device for transporting cylindrical substrates to be coated
LEYBOLD SYSTEMS GMBH38 citations90
US6242053B1Jun 5, 2001
Process for coating plastic containers or glass containers by means of a PCVD coating process
LEYBOLD SYSTEMS GMBH16 citations82
US6335054B1Jan 1, 2002
Air lock for introducing substrates to and/or removing them from a treatment chamber
LEYBOLD SYSTEMS GMBH8 citations71
US5849087ADec 15, 1998
Vacuum treatment system for applying thin layers to substrates such as headlights reflectors
LEYBOLD SYSTEMS GMBH15 citations70
US6123494ASep 26, 2000
Process for the loading and unloading of an evacuatable treatment chamber and handling device for carrying out the process
LEYBOLD SYSTEMS GMBH11 citations69
APPLIED MATERIALS INC
4 patentsUS9022715B2May 5, 2015
Load lock chamber designs for high-throughput processing system
APPLIED MATERIALS INC2 citations58
US7763535B2Jul 27, 2010
Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell
APPLIED MATERIALS INC3 citations56
US8869967B2Oct 28, 2014
Dynamic load lock with cellular structure for discrete substrates
APPLIED MATERIALS INC0 citations47
US7837796B2Nov 23, 2010
Process chamber, inline coating installation and method for treating a substrate
APPLIED MATERIALS INC0 citations34