Inventor
TAKAHASHI MITSUKAZU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI MITSUKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
7 patentsUS5315092AMay 24, 1994
Apparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatus
DAINIPPON SCREEN MFG609 citations97
US6518547B2Feb 11, 2003
Heat treatment apparatus
DAINIPPON SCREEN MFG30 citations90
US5539855AJul 23, 1996
Apparatus for measuring the temperature of a substrate
DAINIPPON SCREEN MFG33 citations89
US7038173B2May 2, 2006
Thermal processing apparatus and thermal processing method
DAINIPPON SCREEN MFG13 citations76
US6868302B2Mar 15, 2005
Thermal processing apparatus
DAINIPPON SCREEN MFG11 citations73
US9327918B2May 3, 2016
Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate
DAINIPPON SCREEN MFG3 citations68
US7371997B2May 13, 2008
Thermal processing apparatus and thermal processing method
DAINIPPON SCREEN MFG7 citations68
SCREEN HOLDINGS CO LTD
5 patentsUS10910247B2Feb 2, 2021
Substrate container, load port apparatus, and substrate treating apparatus
SCREEN HOLDINGS CO LTD3 citations71
US9576831B2Feb 21, 2017
Substrate container, a load port apparatus, and a substrate treating apparatus
SCREEN HOLDINGS CO LTD3 citations71
US10964556B2Mar 30, 2021
Substrate processing apparatus, substrate processing system, and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12080566B2Sep 3, 2024
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD0 citations48
US10381249B2Aug 13, 2019
Substrate container, load port apparatus, and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations40