Inventor

AKIYOSHI KATSUICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AKIYOSHI KATSUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCREEN HOLDINGS CO LTD

2 patents

US11516884B2Nov 29, 2022

Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto

SCREEN HOLDINGS CO LTD0 citations60

US10679874B2Jun 9, 2020

Light irradiation type heat treatment apparatus and heat treatment method

SCREEN HOLDINGS CO LTD0 citations47

DAINIPPON SCREEN MFG

1 patent

US5539855AJul 23, 1996

Apparatus for measuring the temperature of a substrate

DAINIPPON SCREEN MFG33 citations89