Inventor
SHINYA HIROSHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SHINYA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS5876280AMar 2, 1999
Substrate treating system and substrate treating method
TOKYO ELECTRON LTD91 citations97
US7980003B2Jul 19, 2011
Heat processing apparatus and heat processing method
TOKYO ELECTRON LTD16 citations92
US6796054B2Sep 28, 2004
Low-pressure dryer and low-pressure drying method
TOKYO ELECTRON LTD30 citations92
US5928390AJul 27, 1999
Vertical processing apparatus
TOKYO ELECTRON LTD45 citations92
US6573031B2Jun 3, 2003
Apparatus and method of thermal processing and method of pattern formation
TOKYO ELECTRON LTD24 citations88
US7060939B2Jun 13, 2006
Substrate heating method, substrate heating system, and applying developing system
TOKYO ELECTRON LTD11 citations84
US7757626B2Jul 20, 2010
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD8 citations82
US7024798B2Apr 11, 2006
Low-pressure dryer and low-pressure drying method
TOKYO ELECTRON LTD10 citations74
US6986214B2Jan 17, 2006
Low-pressure dryer and low-pressure drying method
TOKYO ELECTRON LTD9 citations74
US7223945B2May 29, 2007
Substrate heating method, substrate heating system, and applying developing system
TOKYO ELECTRON LTD2 citations63
US7050710B2May 23, 2006
Thermal treatment equipment and thermal treatment method
TOKYO ELECTRON LTD4 citations60
TOSHIBA KK
5 patentsUS6957378B2Oct 18, 2005
Semiconductor memory device
TOSHIBA KK39 citations91
US6570801B2May 27, 2003
Semiconductor memory having refresh function
TOSHIBA KK14 citations84
US4849653AJul 18, 1989
Semiconductor circuit device for preventing an output of a bistable circuit from becoming unstable
TOSHIBA KK19 citations81
US7266759B2Sep 4, 2007
Semiconductor integrated circuit device and error checking and correcting method thereof
TOSHIBA KK8 citations72
US7385849B2Jun 10, 2008
Semiconductor integrated circuit device
TOSHIBA KK6 citations61