P

Inventor

YASHIKI HIROSHI

JP15 patents
⚠️ This page may combine multiple inventors who share the name “YASHIKI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

11 patents

SPEEDFAM CO LTD

3 patents

SPEEDFAM IPEC CORP

1 patent