Inventor

ARMACOST MICHAEL D

US30 patents

⚠️ This page may combine multiple inventors who share the name “ARMACOST MICHAEL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ARMACOST MICHAEL D

APPLIED MATERIALS INC

Airgap for semiconductor devices

Dielectric materials to prevent photoresist poisoning

Method of forming a dual damascene structure utilizing a three layer hard mask structure

Process kit erosion and service life prediction

Process kit erosion and service life prediction

Etch depth control for dual damascene fabrication process

Methods and mechanisms for secure data sharing

Anomaly detection from aggregate statistics using neural networks

Anomaly detection from aggregate statistics using neural networks

System and method for monitoring sensor linearity as part of a production process

Semiconductor device search and classification

Method and system for balancing the electrostatic chucking force on a substrate

Topography prediction using system state information

Plasma for resist removal and facet control of underlying features

IBM

High performance, low power vertical integrated CMOS devices

High performance, low power vertical integrated CMOS devices

Plug strap process utilizing selective nitride and oxide etches

Corner protected shallow trench isolation device

Process of etching an oxide layer

Silicon article having columns and method of making

Method of making a disposable corner etch stop-spacer for borderless contacts

Selective deposition process

Fine-pitch device lithography using a sacrificial hardmask

High density selective SiO2 :Si3 N4 etching using a stoichiometrically altered nitride etch stop

Resist formulation which minimizes blistering during etching

Method of making silicon article having columns

Metal-insulator-metal capacitor in copper

Selective nitride: oxide anisotropic etch process

(unassigned)

Monitoring dimensions of features at different locations in the processing of substrates

PATZ RYAN JAMES

Method for fabricating interconnect structures for semiconductor devices