Inventor
CONLEY WILLARD E
US13 patents
⚠️ This page may combine multiple inventors who share the name “CONLEY WILLARD E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS5322765AJun 21, 1994
Dry developable photoresist compositions and method for use thereof
IBM47 citations91
US4931379AJun 5, 1990
High sensitivity resists having autodecomposition temperatures greater than about 160° C.
IBM30 citations91
US6207353B1Mar 27, 2001
Resist formulation which minimizes blistering during etching
IBM28 citations90
US5296332AMar 22, 1994
Crosslinkable aqueous developable photoresist compositions and method for use thereof
IBM49 citations90
US5240812AAug 31, 1993
Top coat for acid catalyzed resists
IBM35 citations90
US4828964AMay 9, 1989
Polyimide formulation for forming a patterned film on a substrate
IBM7 citations67
US7883829B2Feb 8, 2011
Lithography for pitch reduction
IBM4 citations62