Inventor
COUTEAU TERRI A
US7 patents
Patents
7 patentsUS6326313B1Dec 4, 2001
Method and apparatus for partial drain during a nitride strip process step
ADVANCED MICRO DEVICES INC34 citations85
US6492275B2Dec 10, 2002
Control of transistor performance through adjustment of spacer oxide profile with a wet etch
ADVANCED MICRO DEVICES INC14 citations82
US6352867B1Mar 5, 2002
Method of controlling feature dimensions based upon etch chemistry concentrations
ADVANCED MICRO DEVICES INC7 citations73
US6348289B1Feb 19, 2002
System and method for controlling polysilicon feature critical dimension during processing
ADVANCED MICRO DEVICES INC8 citations70
US6790683B1Sep 14, 2004
Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same
ADVANCED MICRO DEVICES INC2 citations61
US6524869B1Feb 25, 2003
Method and apparatus for detecting ion implant induced defects
ADVANCED MICRO DEVICES INC2 citations58
US6566886B1May 20, 2003
Method of detecting crystalline defects using sound waves
ADVANCED MICRO DEVICES INC1 citations45