Inventor
SUTTON DANIEL E
US4 patents
Patents
4 patentsUS6649525B1Nov 18, 2003
Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process
ADVANCED MICRO DEVICES INC7 citations69
US6440621B1Aug 27, 2002
Method of detecting film defects using chemical exposure of photoresist films
ADVANCED MICRO DEVICES INC11 citations69
US6759179B1Jul 6, 2004
Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process
ADVANCED MICRO DEVICES INC2 citations58
US6524869B1Feb 25, 2003
Method and apparatus for detecting ion implant induced defects
ADVANCED MICRO DEVICES INC2 citations58