Inventor

SZEPESI MICKEY

US3 patents

Patents

3 patents

US7273693B2Sep 25, 2007

Method for forming a planar mirror using a sacrificial oxide

HEWLETT PACKARD DEVELOPMENT CO23 citations91

US6917459B2Jul 12, 2005

MEMS device and method of forming MEMS device

HEWLETT PACKARD DEVELOPMENT CO35 citations90

US6979585B2Dec 27, 2005

Micro-electromechanical system

HEWLETT PACKARD DEVELOPMENT CO5 citations61