Inventor
CHEN KUEN-EI
TW4 patents
Patents
4 patentsUS6938505B2Sep 6, 2005
Chamber wafer detection
TAIWAN SEMICONDUCTOR MFG29 citations89
US6745901B2Jun 8, 2004
Wafer cassette equipped with piezoelectric sensors
TAIWAN SEMICONDUCTOR MFG16 citations74
US6949938B2Sep 27, 2005
Prevention of robot damage via capacitive sensor assembly
TAIWAN SEMICONDUCTOR MFG2 citations53
US7187184B2Mar 6, 2007
Prevention of robot damage via capacitive sensor assembly
TAIWAN SEMICONDUCTOR MFG0 citations43