Inventor

LIN SHAN-CHING

TW3 patents

⚠️ This page may combine multiple inventors who share the name “LIN SHAN-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US6949938B2Sep 27, 2005

Prevention of robot damage via capacitive sensor assembly

TAIWAN SEMICONDUCTOR MFG2 citations53

US7187184B2Mar 6, 2007

Prevention of robot damage via capacitive sensor assembly

TAIWAN SEMICONDUCTOR MFG0 citations43

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9781994B2Oct 10, 2017

Wafer cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36