Inventor
HSU STEPHEN
US19 patents
⚠️ This page may combine multiple inventors who share the name “HSU STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
5 patentsUS6519760B2Feb 11, 2003
Method and apparatus for minimizing optical proximity effects
ASML MASKTOOLS BV61 citations96
US6851103B2Feb 1, 2005
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography
ASML MASKTOOLS BV44 citations95
US6951701B2Oct 4, 2005
Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM
ASML MASKTOOLS BV18 citations92
US7523438B2Apr 21, 2009
Method for improved lithographic patterning utilizing optimized illumination conditions and high transmission attenuated PSM
ASML MASKTOOLS BV15 citations84
US7549140B2Jun 16, 2009
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography
ASML MASKTOOLS BV5 citations73
DIRECTLY SOFTWARE INC
3 patentsUNIV GEORGE WASHINGTON
2 patentsUS12540291B2Feb 3, 2026
Microencapsulation of friction modifier additives and other additives for performance enhancement in automotive and industrial applications
UNIV GEORGE WASHINGTON0 citations62
US12344765B2Jul 1, 2025
Icephobic surfaces and methods of producing the same
UNIV GEORGE WASHINGTON0 citations52