Inventor
TINNEMANS PATRICIUS ALOYSIUS J
NL11 patents
Patents
11 patentsUS7411653B2Aug 12, 2008
Lithographic apparatus
ASML NETHERLANDS BV49 citations96
US7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US7403265B2Jul 22, 2008
Lithographic apparatus and device manufacturing method utilizing data filtering
ASML NETHERLANDS BV21 citations92
US7403261B2Jul 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations92
US7379155B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations90
US7307695B2Dec 11, 2007
Method and device for alignment of a substrate
ASML NETHERLANDS BV27 citations87
US7239373B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US7230677B2Jun 12, 2007
Lithographic apparatus and device manufacturing method utilizing hexagonal image grids
ASML NETHERLANDS BV10 citations83
US7317510B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations78
US7126672B2Oct 24, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations73
US7251019B2Jul 31, 2007
Lithographic apparatus and device manufacturing method utilizing a continuous light beam in combination with pixel grid imaging
ASML NETHERLANDS BV2 citations62