Inventor
VISSER RAIMOND
NL12 patents
⚠️ This page may combine multiple inventors who share the name “VISSER RAIMOND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7307695B2Dec 11, 2007
Method and device for alignment of a substrate
ASML NETHERLANDS BV27 citations87
US7394520B2Jul 1, 2008
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
ASML NETHERLANDS BV10 citations79
US7486384B2Feb 3, 2009
Lithographic support structure
ASML NETHERLANDS BV11 citations77
US7408618B2Aug 5, 2008
Lithographic apparatus substrate alignment
ASML NETHERLANDS BV2 citations61
US7123349B2Oct 17, 2006
Lithographic projection assembly, substrate handling apparatus and substrate handling method
ASML NETHERLANDS BV5 citations60
US7283225B2Oct 16, 2007
Particle detection device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7131999B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7106420B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US10007197B2Jun 26, 2018
Sensor system, substrate handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations42
US7394525B2Jul 1, 2008
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations36