Inventor
RUSU CAMELIA
US16 patents
⚠️ This page may combine multiple inventors who share the name “RUSU CAMELIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS7749353B2Jul 6, 2010
High aspect ratio etch using modulation of RF powers of various frequencies
LAM RES CORP30 citations92
US7144521B2Dec 5, 2006
High aspect ratio etch using modulation of RF powers of various frequencies
LAM RES CORP24 citations92
US7405521B2Jul 29, 2008
Multiple frequency plasma processor method and apparatus
LAM RES CORP35 citations91
US6942816B2Sep 13, 2005
Methods of reducing photoresist distortion while etching in a plasma processing system
LAM RES CORP14 citations83
US7645707B2Jan 12, 2010
Etch profile control
LAM RES CORP7 citations73
US9865472B2Jan 9, 2018
Fabrication of a silicon structure and deep silicon etch with profile control
LAM RES CORP3 citations70
US7785753B2Aug 31, 2010
Method and apparatus for providing mask in semiconductor processing
LAM RES CORP3 citations61
US9514955B2Dec 6, 2016
Patterning of a hard mask material
LAM RES CORP0 citations51
US7341953B2Mar 11, 2008
Mask profile control for controlling feature profile
LAM RES CORP0 citations41
XU QING
3 patentsUS8440473B2May 14, 2013
Use of spectrum to synchronize RF switching with gas switching during etch
XU QING6 citations71
US8691698B2Apr 8, 2014
Controlled gas mixing for smooth sidewall rapid alternating etch process
XU QING3 citations62
US8609548B2Dec 17, 2013
Method for providing high etch rate
XU QING0 citations40