Inventor
KUSAKABE YOSHIHIKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KUSAKABE YOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS5534073AJul 9, 1996
Semiconductor producing apparatus comprising wafer vacuum chucking device
MITSUBISHI ELECTRIC CORP213 citations98
US5976260ANov 2, 1999
Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus
MITSUBISHI ELECTRIC CORP48 citations95
US5155340AOct 13, 1992
Thin high temperature heater
MITSUBISHI ELECTRIC CORP36 citations91
US6472324B2Oct 29, 2002
Method of manufacturing trench type element isolation structure
MITSUBISHI ELECTRIC CORP17 citations81
US5118983AJun 2, 1992
Thermionic electron source
MITSUBISHI ELECTRIC CORP19 citations72
RENESAS TECH CORP
3 patentsRENESAS ELECTRONICS CORP
3 patentsUS7859909B2Dec 28, 2010
Nonvolatile semiconductor memory device
RENESAS ELECTRONICS CORP1 citations60
US8039336B2Oct 18, 2011
Semiconductor device and method of fabrication thereof
RENESAS ELECTRONICS CORP0 citations48
US7846788B2Dec 7, 2010
Semiconductor device and method of fabrication thereof
RENESAS ELECTRONICS CORP0 citations48