Inventor

CHEN LI-JUI

TW274 patents

⚠️ This page may combine multiple inventors who share the name “CHEN LI-JUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN LI-JUI

TAIWAN SEMICONDUCTOR MFG CO LTD

System and method for extreme ultraviolet source control

Semiconductor processing tool and methods of operation

System and method for dynamically controlling temperature of thermostatic reticles

EUV lithography mask with a porous reflective multilayer structure

Extreme ultraviolet lithography system

Radiation source for lithography process

Pressurized tin collection bucket with in-line draining mechanism

Residual gain monitoring and reduction for EUV drive laser

EUV radiation modification methods and systems

Lithography apparatus and method for protecting a reticle

Particle image velocimetry of extreme ultraviolet lithography systems

EUV vessel inspection method and related system

Method and apparatus for removing debris from collector

Lithography apparatus and method

System and method for omnidirectional real time detection of photolithography characteristics

Method and apparatus for mitigating tin debris

Extreme ultraviolet lithography system

Droplet generator and method of servicing a photolithographic tool

Pellicle assembly and method of making same

Methods of cleaning a lithography system

EUV light source and apparatus for lithography

EUV lithography mask with a porous reflective multilayer structure

System and method for detecting debris in a photolithography system

Lithography contamination control

Lithography apparatus and method for using the same

EUV radiation modification methods and systems

Particle removal device and method

Radiation source for lithography process

Droplet generator and method of servicing a photolithographic tool

EUV light source and apparatus for lithography

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Apparatus and method for generating extreme ultraviolet radiation

Residual gain monitoring and reduction for EUV drive laser

Extreme ultraviolet control system for adjusting droplet illumination parameters

Radiation source apparatus and method for decreasing debris in radiation source apparatus

Radiation source for lithography process

EUV radiation modification methods and systems

Vessel for extreme ultraviolet radiation source

EUV light source and apparatus for lithography

System and method for extreme ultraviolet source control

Radiation source apparatus

Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system

Extreme ultraviolet radiation source and cleaning method thereof

TAIWAN SEMICONDUCTOR MFG

Method of defining forbidden pitches for a lithography exposure tool

Wafer stage temperature control

Geometric compensation method for charged particle beam irradiation

IND TECH RES INST

Fabry-Perot filter apparatus with enhanced optical discrimination

CHEN LI-JUI

In-line particle detection for immersion lithography