Inventor

SU YEN-SHUO

TW26 patents

⚠️ This page may combine multiple inventors who share the name “SU YEN-SHUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SU YEN-SHUO

TAIWAN SEMICONDUCTOR MFG CO LTD

Integrated magnetic core inductor and methods of fabrications thereof

Method for fabricating magnetic core

Control system for plasma chamber having controllable valve and method of using the same

Target control in extreme ultraviolet lithography systems using aberration of reflection image

Shock wave visualization for extreme ultraviolet plasma optimization

Target control in extreme ultraviolet lithography systems using aberration of reflection image

Mitigating long-term energy decay of laser devices

Shock wave visualization for extreme ultraviolet plasma optimization

Magnetic memory with metal oxide etch stop layer and method for manufacturing the same

Semiconductor processing tool and methods of operation

Method and apparatus for mitigating contamination

Control system for plasma chamber having controllable valve

Method and apparatus for mitigating contamination

Apparatus and method for generating extreme ultraviolet radiation

Method for fabricating magnetic core

Shock wave visualization for extreme ultraviolet plasma optimization

Target control in extreme ultraviolet lithography systems using aberration of reflection image

Mitigating long-term energy decay of laser devices

EUV light source and apparatus for lithography

Magnetic core, inductor, and method for fabricating the magnetic core

Thermal controlling method in lithography system

SU YEN SHUO

Versatile tableware device

Wind-proof umbrella

SU YEN-SHUO

Plasma chamber having an upper electrode having controllable valves and a method of using the same

TAIWAN SEMICONDUCTOR MFG

Metal-insulator-metal capacitor structure

CHEN CHIEN AN

Multi-zone EPD detectors