P

Inventor

KAWASAKI HIROYUKI

JP46 patents
⚠️ This page may combine multiple inventors who share the name “KAWASAKI HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

21 patents
US6926493B1Aug 9, 2005

Turbo-molecular pump

EBARA CORP33 citations92
US6782907B2Aug 31, 2004

Gas recirculation flow control method and apparatus for use in vacuum system

EBARA CORP36 citations92
US6589009B1Jul 8, 2003

Turbo-molecular pump

EBARA CORP20 citations92
US6382249B1May 7, 2002

Vacuum exhaust system

EBARA CORP28 citations92
US6332752B2Dec 25, 2001

Turbo-molecular pump

EBARA CORP15 citations92
US10328465B2Jun 25, 2019

Substrate processing apparatus and substrate processing method

EBARA CORP6 citations84
US6409468B1Jun 25, 2002

Turbo-molecular pump

EBARA CORP18 citations84
US6585480B2Jul 1, 2003

Turbo-molecular pump

EBARA CORP11 citations74
US6468030B2Oct 22, 2002

Turbo-molecular pump

EBARA CORP10 citations74
US9393595B2Jul 19, 2016

Abrasive film fabrication method and abrasive film

EBARA CORP3 citations73
US9492910B2Nov 15, 2016

Polishing method

EBARA CORP5 citations72
US7938619B2May 10, 2011

Turbo vacuum pump

EBARA CORP2 citations63
US7645116B2Jan 12, 2010

Turbo vacuum pump

EBARA CORP3 citations63
US11441576B2Sep 13, 2022

Double-suction centrifugal pump

EBARA CORP1 citations62
US11192147B2Dec 7, 2021

Substrate processing apparatus and substrate processing method

EBARA CORP0 citations62
US6953317B2Oct 11, 2005

Turbo-molecular pump

EBARA CORP2 citations62
US12110909B2Oct 8, 2024

Vertical multi-stage pump

EBARA CORP1 citations57
US11835047B2Dec 5, 2023

Pump apparatus

EBARA CORP0 citations54
US10799917B2Oct 13, 2020

Substrate processing apparatus and substrate processing method

EBARA CORP0 citations52
US10016875B2Jul 10, 2018

Abrasive film fabrication method and abrasive film

EBARA CORP0 citations52
US11143186B2Oct 12, 2021

Liquid ring vacuum pump

EBARA CORP0 citations48

KAWASAKI HIROYUKI

4 patents

KOKOCHI SANGYO CO LTD

3 patents

TONE BORING CO

2 patents

HONDA MOTOR CO LTD

2 patents

KOBE STEEL LTD

2 patents

FUJIKURA LTD

2 patents

MITSUBISHI CHEM IND

2 patents

KAWASAKI HEAVY IND LTD

2 patents

EBERA CORP

1 patent

TONE KK

1 patent

HITACHI LTD

1 patent

FUJI PHOTO FILM CO LTD

1 patent

HITACHI INDUSTRY EQUIPMENT SYSTEMS CO LTD

1 patent

KIKUCHI MINORU

1 patent