P

Inventor

MIYATAKE NAOMASA

JP5 patents
⚠️ This page may combine multiple inventors who share the name “MIYATAKE NAOMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUI SHIPBUILDING ENG

3 patents
US7022545B2Apr 4, 2006

Production method of SiC monitor wafer

MITSUI SHIPBUILDING ENG11 citations81
US10669630B2Jun 2, 2020

Layer-forming device and injector

MITSUI SHIPBUILDING ENG0 citations36
US10246776B2Apr 2, 2019

Layer-forming device and layer-forming method

MITSUI SHIPBUILDING ENG0 citations36

WASHIO KEISUKI

1 patent
US8440268B2May 14, 2013

Method and apparatus for growing plasma atomic layer

WASHIO KEISUKI5 citations62

TACHIBANA HIROYUKI

1 patent
US9194043B2Nov 24, 2015

Atomic layer deposition apparatus

TACHIBANA HIROYUKI0 citations36