Inventor
BUONODONO JAMES P
US12 patents
⚠️ This page may combine multiple inventors who share the name “BUONODONO JAMES P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
7 patentsUS10468226B1Nov 5, 2019
Extraction apparatus and system for high throughput ion beam processing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC15 citations92
US9916966B1Mar 13, 2018
Apparatus and method for minimizing thermal distortion in electrodes used with ion sources
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9 citations82
US11127556B2Sep 21, 2021
Extraction apparatus and system for high throughput ion beam processing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations71
US11145496B2Oct 12, 2021
System for using O-rings to apply holding forces
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10062544B2Aug 28, 2018
Apparatus and method for minimizing thermal distortion in electrodes used with ion sources
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
US9484183B2Nov 1, 2016
Linkage conduit for vacuum chamber applications
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49
US9520312B2Dec 13, 2016
System and method for moving workpieces between multiple vacuum environments
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations39
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS8816299B1Aug 26, 2014
Workpiece support structure with four degree of freedom air bearing for high vacuum systems
VARIAN SEMICONDUCTOR EQUIPMENT4 citations71
US9287085B2Mar 15, 2016
Processing apparatus and method of treating a substrate
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US9190248B2Nov 17, 2015
Dynamic electrode plasma system
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US7453069B2Nov 18, 2008
Bushing unit with integrated conductor in ion accelerating device and related method
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US9337076B2May 10, 2016
Workpiece support structure with four degree of freedom air bearing for high vacuum systems
VARIAN SEMICONDUCTOR EQUIPMENT0 citations40