Inventor
TOYOMASU FUJIHIKO
JP15 patents
Patents
15 patentsUS6338671B1Jan 15, 2002
Apparatus for supplying polishing liquid
EBARA CORP41 citations91
US6802762B2Oct 12, 2004
Method for supplying slurry to polishing apparatus
EBARA CORP13 citations83
US11358253B2Jun 14, 2022
Cleaning liquid supply device, cleaning unit, and storage medium storing program
EBARA CORP2 citations71
US12447449B2Oct 21, 2025
Chemical supply apparatus, cleaning system, and chemical supply method
EBARA CORP0 citations62
US10926301B2Feb 23, 2021
Liquid supplying device and liquid supplying method
EBARA CORP0 citations62
US6722953B2Apr 20, 2004
Abrasive liquid feed apparatus, method for feeding additive to abrasive liquid feed apparatus, and polishing apparatus
EBARA CORP4 citations62
US12042901B2Jul 23, 2024
Cleaning liquid supply device, cleaning unit, and storage medium storing program
EBARA CORP0 citations61
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US12208428B2Jan 28, 2025
Liquid supplying device and method for draining liquid thereof
EBARA CORP0 citations51
US12140980B2Nov 12, 2024
Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate
EBARA CORP0 citations51
US11890652B2Feb 6, 2024
Cleaning chemical liquid supply device and cleaning chemical liquid supply method
EBARA CORP0 citations51
US10343192B2Jul 9, 2019
Liquid supplying device and liquid supplying method
EBARA CORP0 citations51
US10438818B2Oct 8, 2019
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus
EBARA CORP0 citations41
US10340159B2Jul 2, 2019
Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit
EBARA CORP0 citations41
US10373845B2Aug 6, 2019
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations40