Inventor
DORDI YEZDI N
US22 patents
⚠️ This page may combine multiple inventors who share the name “DORDI YEZDI N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6582578B1Jun 24, 2003
Method and associated apparatus for tilting a substrate upon entry for metal deposition
APPLIED MATERIALS INC80 citations97
US6613214B2Sep 2, 2003
Electric contact element for electrochemical deposition system and method
APPLIED MATERIALS INC56 citations96
US6521102B1Feb 18, 2003
Perforated anode for uniform deposition of a metal layer
APPLIED MATERIALS INC53 citations96
US7427338B2Sep 23, 2008
Flow diffuser to be used in electro-chemical plating system
APPLIED MATERIALS INC21 citations92
US6837978B1Jan 4, 2005
Deposition uniformity control for electroplating apparatus, and associated method
APPLIED MATERIALS INC36 citations92
US6585876B2Jul 1, 2003
Flow diffuser to be used in electro-chemical plating system and method
APPLIED MATERIALS INC35 citations92
US6551484B2Apr 22, 2003
Reverse voltage bias for electro-chemical plating system and method
APPLIED MATERIALS INC29 citations92
US6572010B2Jun 3, 2003
Integrated solder bump deposition apparatus and method
APPLIED MATERIALS INC11 citations74
LAM RES CORP
8 patentsUS7153400B2Dec 26, 2006
Apparatus and method for depositing and planarizing thin films of semiconductor wafers
LAM RES CORP33 citations93
US7947157B2May 24, 2011
Apparatus and method for depositing and planarizing thin films of semiconductor wafers
LAM RES CORP5 citations63
US7862693B2Jan 4, 2011
Apparatus for plating semiconductor wafers
LAM RES CORP4 citations62
US7811423B2Oct 12, 2010
Proximity processing using controlled batch volume with an integrated proximity head
LAM RES CORP2 citations60
US11424158B2Aug 23, 2022
Metal liner passivation and adhesion enhancement by zinc doping
LAM RES CORP0 citations57
US8822344B1Sep 2, 2014
Method of etching an etch layer
LAM RES CORP0 citations52
US7645364B2Jan 12, 2010
Apparatus and method for plating semiconductor wafers
LAM RES CORP1 citations51
US10741440B2Aug 11, 2020
Metal liner passivation and adhesion enhancement by zinc doping
LAM RES CORP0 citations47