Inventor
ISHIHARA TAKANOBU
JP28 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHARA TAKANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
12 patentsUS8003963B2Aug 23, 2011
Extreme ultraviolet light source apparatus
GIGAPHOTON INC21 citations92
US7999241B2Aug 16, 2011
Extreme ultraviolet light source apparatus
GIGAPHOTON INC40 citations92
US9192038B2Nov 17, 2015
Target supply apparatus, control system, control apparatus and control circuit thereof
GIGAPHOTON INC5 citations84
US10548209B2Jan 28, 2020
Chamber apparatus, target generation method, and EUV light generation apparatus
GIGAPHOTON INC2 citations73
US8705035B2Apr 22, 2014
Target generation device
GIGAPHOTON INC3 citations63
US8343429B2Jan 1, 2013
Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same
GIGAPHOTON INC3 citations63
US10028365B2Jul 17, 2018
Chamber device, target generation method, and extreme ultraviolet light generation system
GIGAPHOTON INC1 citations52
US9338869B2May 10, 2016
EUV light source apparatus
GIGAPHOTON INC0 citations52
US9233782B2Jan 12, 2016
Target supply device
GIGAPHOTON INC0 citations52
US10237961B2Mar 19, 2019
Target supply device, processing device and processing method therefor
GIGAPHOTON INC0 citations46
US10136509B2Nov 20, 2018
Target supply device, processing device and processing method thefefor
GIGAPHOTON INC0 citations46
US10524343B2Dec 31, 2019
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations41
KOMATSU MFG CO LTD
7 patentsUS6130904AOct 10, 2000
Gas supplementation method of excimer laser apparatus
KOMATSU MFG CO LTD48 citations92
US7782922B2Aug 24, 2010
Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
KOMATSU MFG CO LTD12 citations84
US6570899B1May 27, 2003
Gas laser device
KOMATSU MFG CO LTD12 citations73
US6771685B1Aug 3, 2004
Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith
KOMATSU MFG CO LTD4 citations62
US6628693B1Sep 30, 2003
Discharge electrode for laser device
KOMATSU MFG CO LTD5 citations62
US6490310B1Dec 3, 2002
Laser discharge electrodes with current return plate structure
KOMATSU MFG CO LTD1 citations52
US6507596B1Jan 14, 2003
Gas laser apparatus
KOMATSU MFG CO LTD0 citations41
NAGAI SHINJI
4 patentsUS8530869B2Sep 10, 2013
Extreme ultraviolet light source apparatus
NAGAI SHINJI7 citations84
US8242474B2Aug 14, 2012
Extreme ultraviolet light generation apparatus
NAGAI SHINJI6 citations84
US8629417B2Jan 14, 2014
Extreme ultraviolet light generation apparatus
NAGAI SHINJI4 citations73
US8569723B2Oct 29, 2013
Extreme ultraviolet light source apparatus
NAGAI SHINJI4 citations62