Inventor
HSIEH CHIN-SHEN
CN11 patents
Patents
11 patentsUS11367632B2Jun 21, 2022
Heater lift assembly spring damper
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US11237646B2Feb 1, 2022
Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10866653B2Dec 15, 2020
Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10466810B2Nov 5, 2019
Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12512338B2Dec 30, 2025
Heater lift assembly spring damper
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12009232B2Jun 11, 2024
Heater lift assembly spring damper
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11599206B2Mar 7, 2023
Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11901215B2Feb 13, 2024
Vacuum wafer chuck for manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11335585B2May 17, 2022
Vacuum wafer chuck for manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12179161B2Dec 31, 2024
Gas mixing system for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US11772058B2Oct 3, 2023
Gas mixing system for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations54