Inventor
Sanko Dimitry
US7 patents
Patents
7 patentsUS11604420B2Mar 14, 2023
Self-calibrating overlay metrology
KLA CORP2 citations70
US11556738B2Jan 17, 2023
System and method for determining target feature focus in image-based overlay metrology
KLA CORP2 citations70
US12181271B2Dec 31, 2024
Estimating in-die overlay with tool induced shift correction
KLA CORP2 citations69
US11921825B2Mar 5, 2024
System and method for determining target feature focus in image-based overlay metrology
KLA CORP0 citations59
US11880142B2Jan 23, 2024
Self-calibrating overlay metrology
KLA CORP0 citations59
US11604063B2Mar 14, 2023
Self-calibrated overlay metrology using a skew training sample
KLA CORP1 citations59
US12480893B2Nov 25, 2025
Optical and X-ray metrology methods for patterned semiconductor structures with randomness
KLA CORP0 citations43