Inventor
MURRAY CONAL
US9 patents
Patents
9 patentsUS6974531B2Dec 13, 2005
Method for electroplating on resistive substrates
IBM20 citations92
US6812143B2Nov 2, 2004
Process of forming copper structures
IBM19 citations92
US6787912B2Sep 7, 2004
Barrier material for copper structures
IBM27 citations92
US11927616B2Mar 12, 2024
Evaluation of wafer carcass alpha particle emission
IBM0 citations62
US11069567B2Jul 20, 2021
Modulating metal interconnect surface topography
IBM0 citations61
US10903115B2Jan 26, 2021
Controlling grain boundaries in high aspect-ratio conductive regions
IBM0 citations61
US10600686B2Mar 24, 2020
Controlling grain boundaries in high aspect-ratio conductive regions
IBM0 citations51
US10522398B2Dec 31, 2019
Modulating metal interconnect surface topography
IBM0 citations51
US7105817B2Sep 12, 2006
Method of forming images in a scanning electron microscope
IBM1 citations45