Inventor
VAN DAM MARINUS JOHANNES MARIA
NL17 patents
⚠️ This page may combine multiple inventors who share the name “VAN DAM MARINUS JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS10895452B2Jan 19, 2021
Metrology apparatus
ASML NETHERLANDS BV3 citations73
US10775704B2Sep 15, 2020
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein
ASML NETHERLANDS BV4 citations73
US10365565B2Jul 30, 2019
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein
ASML NETHERLANDS BV3 citations73
US11940739B2Mar 26, 2024
Metrology apparatus
ASML NETHERLANDS BV1 citations72
US11262661B2Mar 1, 2022
Metrology apparatus
ASML NETHERLANDS BV4 citations72
US9785051B2Oct 10, 2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV5 citations72
US10809193B2Oct 20, 2020
Inspection apparatus having non-linear optics
ASML NETHERLANDS BV3 citations71
US10488765B2Nov 26, 2019
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus
ASML NETHERLANDS BV2 citations71
US9927711B2Mar 27, 2018
Actuation mechanism, optical apparatus and lithography apparatus
ASML NETHERLANDS BV3 citations68
US12591179B2Mar 31, 2026
Metrology apparatus
ASML NETHERLANDS BV0 citations62
US11549806B2Jan 10, 2023
Metrology apparatus
ASML NETHERLANDS BV0 citations62
US7148954B2Dec 12, 2006
Lithographic apparatus and method for its use
ASML NETHERLANDS BV0 citations51
US12460971B2Nov 4, 2025
Wavelength selection module, illumination system and metrology system
ASML NETHERLANDS BV0 citations50