Inventor
LIU YAN-HONG
TW26 patents
⚠️ This page may combine multiple inventors who share the name “LIU YAN-HONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
24 patentsUS11101163B2Aug 24, 2021
Systems and methods for automated robotic arm sensing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11756840B2Sep 12, 2023
Reflectance measurement system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11211232B2Dec 28, 2021
Methods for cleaning semiconductor device manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11177183B2Nov 16, 2021
Thickness measurement system and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US11600517B2Mar 7, 2023
Screwless semiconductor processing chambers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US10283393B1May 7, 2019
Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations67
US11211257B2Dec 28, 2021
Semiconductor device fabrication with removal of accumulation of material from sidewall
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US11664265B2May 30, 2023
Systems and methods for robotic arm sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11456203B2Sep 27, 2022
Wafer release mechanism
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11031264B2Jun 8, 2021
Semiconductor device manufacturing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10978333B2Apr 13, 2021
Systems and methods for robotic arm sensing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12154813B2Nov 26, 2024
Electrostatic chuck sidewall gas curtain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11521884B2Dec 6, 2022
Electrostatic chuck sidewall gas curtain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12482682B2Nov 25, 2025
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12040205B2Jul 16, 2024
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11139149B2Oct 5, 2021
Gas injector
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11664260B2May 30, 2023
Systems and methods for orientator based wafer defect sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10978331B2Apr 13, 2021
Systems and methods for orientator based wafer defect sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12165909B2Dec 10, 2024
Screwless semiconductor processing chambers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12014933B2Jun 18, 2024
Semiconductor device fabrication with removal of accumulation of material from sidewall
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US12444657B2Oct 14, 2025
Wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10811290B2Oct 20, 2020
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US11993854B2May 28, 2024
Chamber wall polymer protection system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US11315815B2Apr 26, 2022
Wafer container and method for holding wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45