Inventor
WU CHIEN-CHIH
TW5 patents
Patents
5 patentsUS11177183B2Nov 16, 2021
Thickness measurement system and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12482682B2Nov 25, 2025
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12040205B2Jul 16, 2024
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10811290B2Oct 20, 2020
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9947610B2Apr 17, 2018
Semiconductor structure and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations43