Inventor
CHEN CHE-FU
TW33 patents
Patents
33 patentsUS11443966B2Sep 13, 2022
Semiconductor processing flow field control apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US11101163B2Aug 24, 2021
Systems and methods for automated robotic arm sensing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12027594B2Jul 2, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11756840B2Sep 12, 2023
Reflectance measurement system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11211232B2Dec 28, 2021
Methods for cleaning semiconductor device manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11177183B2Nov 16, 2021
Thickness measurement system and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US11177150B2Nov 16, 2021
Cluster tool and method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11004713B2May 11, 2021
Robot arm device and method for transferring wafer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US11600517B2Mar 7, 2023
Screwless semiconductor processing chambers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US10283393B1May 7, 2019
Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations67
US11664265B2May 30, 2023
Systems and methods for robotic arm sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11456203B2Sep 27, 2022
Wafer release mechanism
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11031264B2Jun 8, 2021
Semiconductor device manufacturing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10978333B2Apr 13, 2021
Systems and methods for robotic arm sensing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12154813B2Nov 26, 2024
Electrostatic chuck sidewall gas curtain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11521884B2Dec 6, 2022
Electrostatic chuck sidewall gas curtain
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12551934B2Feb 17, 2026
Semiconductor cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12482682B2Nov 25, 2025
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12420314B2Sep 23, 2025
Semiconductor cleaning apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12068398B2Aug 20, 2024
Fin field-effect transistor with void and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12040205B2Jul 16, 2024
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11664444B2May 30, 2023
Fin field-effect transistor with void and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11139149B2Oct 5, 2021
Gas injector
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12414347B2Sep 9, 2025
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12090503B2Sep 17, 2024
Semiconductor process chamber contamination prevention system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11837484B2Dec 5, 2023
Robot arm device and method for transferring wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11779949B2Oct 10, 2023
Semiconductor process chamber contamination prevention system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11710620B2Jul 25, 2023
Semiconductor process chamber with heat pipe
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11664260B2May 30, 2023
Systems and methods for orientator based wafer defect sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10978331B2Apr 13, 2021
Systems and methods for orientator based wafer defect sensing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12165909B2Dec 10, 2024
Screwless semiconductor processing chambers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12444657B2Oct 14, 2025
Wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10811290B2Oct 20, 2020
Systems and methods for inspection stations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49