Inventor · disambiguated record
Kyoichi Inaki
Also filed as: INAKI KYOICHI
17 granted patents·5 pending applications·613 citations·filing 1990–2022
95Inventor score
Files withHERAEUS QUARZGLAS8SHINETSU QUARTZ PROD7SHIN ETSU QUARTZ PRODUCTS COMP2SHIN ETSU QUARTZ PROD CO LTD1
Top patents by PatentIndex Score
22 records- 0195US6869898B2Quartz glass jig for processing apparatus using plasmaHERAEUS QUARZGLAS·Filed 2001·Granted Mar 22, 2005·79 cites·8 claims
- 0295US5086352AOptical members and blanks or synthetic silica glass and method for their productionSHINETSU QUARTZ PROD·Filed 1990·Granted Feb 4, 1992·102 cites·39 claims
- 0393US5364433AOptical member of synthetic quartz glass for excimer lasers and method for producing sameSHIN ETSU QUARTZ PRODUCTS COMP·Filed 1992·Granted Nov 15, 1994·91 cites·4 claims
- 0491US5325230AOptical members and blanks of synthetic silica glass and method for their productionSHINETSU QUARTZ PROD·Filed 1991·Granted Jun 28, 1994·92 cites·20 claims
- 0590US5410428AOptical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereofSHINETSU QUARTZ PROD·Filed 1991·Granted Apr 25, 1995·93 cites·21 claims
- 0684USRE41249EQuartz glass body having improved resistance against plasma corrosion, and method for production thereofHERAEUS QUARZGLAS·Filed 2006·Granted Apr 20, 2010·4 cites·27 claims
- 0779US5523266AOptical member of synthetic quartz glass for excimer lasers and method for producing sameSHIN ETSU QUARTZ PRODUCTS COMP·Filed 1994·Granted Jun 4, 1996·37 cites·2 claims
- 0875US6887576B2Quartz glass body having improved resistance against plasma corrosion, and method for production thereofHERAEUS QUARZGLAS·Filed 2001·Granted May 3, 2005·15 cites·12 claims
- 0974US5772714AProcess for producing opaque silica glassSHINETSU QUARTZ PROD·Filed 1996·Granted Jun 30, 1998·29 cites·28 claims
- 1073US5977000AHigh purity opaque silica glassSHINETSU QUARTZ PROD·Filed 1997·Granted Nov 2, 1999·38 cites·4 claims
- 1162US12215052B2Silica glass disc having dimples formed thereonSHIN ETSU QUARTZ PROD CO LTD·Filed 2022·Granted Feb 4, 2025·0 cites·12 claims
- 1255US5876473AMethod of producing cristobalite containing silica glassFiled 1996·Granted Mar 2, 1999·13 cites·4 claims
- 1353US6458445B1Quartz glass jig having large irregularities on the surface and method for producing the sameHERAEUS QUARZGLAS·Filed 1999·Granted Oct 1, 2002·15 cites·11 claims
- 1450US2008241412A1Member for plasma etching device and method for manufacture thereofSHINETSU QUARTZ PROD·Filed 2007·Application pending·0 cites
- 1548US6680455B2Plasma resistant quartz glass jigHERAEUS QUARZGLAS·Filed 2001·Granted Jan 20, 2004·2 cites·8 claims
- 1647US2011232847A1Quartz glass member for plasma etchingHERAEUS QUARZGLAS·Filed 2008·Application pending·0 cites
- 1745US2004050102A1Silica glass jig for semiconductor industry and method for producing the sameFiled 2003·Application pending·0 cites
- 1843US2002078886A1Silica glass jig for semiconductor industry and method for producing the sameFiled 2001·Application pending·0 cites
- 1941US6723386B2Fluororesin-coated quartz glass jig and method for producing the sameHERAEUS QUARZGLAS·Filed 2001·Granted Apr 20, 2004·0 cites·3 claims
- 2040US7645526B2Member for plasma etching device and method for manufacture thereofSHINETSU QUARTZ PROD·Filed 2003·Granted Jan 12, 2010·0 cites·3 claims
- 2139US2004023510A1Method for producing a quartz glass tank for use in ultrasonic cleaning used for fabricating semiconductor and quartz glass tank obtainable from that methodFiled 2003·Application pending·0 cites
- 2233US6514582B1Quartz glass member for use in dry etching and dry etching system equipped with the sameHERAEUS QUARZGLAS·Filed 1999·Granted Feb 4, 2003·3 cites·4 claims
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