Inventor
SEVERT HAN WILLEM HENDRIK
NL4 patents
Patents
4 patentsUS11908656B2Feb 20, 2024
Stage apparatus suitable for a particle beam apparatus
ASML NETHERLANDS BV0 citations59
US12525900B2Jan 13, 2026
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11637512B2Apr 25, 2023
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57