Inventor
RONDE MICHAEL JOHANNES CHRISTIAAN
NL4 patents
Patents
4 patentsUS12525900B2Jan 13, 2026
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US10649347B2May 12, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations57
US11302512B2Apr 12, 2022
Electron beam inspection apparatus stage positioning
ASML NETHERLANDS BV0 citations47