Inventor
WANG YIXIANG
US34 patents
⚠️ This page may combine multiple inventors who share the name “WANG YIXIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
27 patentsUS10784077B2Sep 22, 2020
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV5 citations81
US11728131B2Aug 15, 2023
Thermal-aided inspection by advanced charge controller module in a charged particle system
ASML NETHERLANDS BV2 citations73
US11183360B2Nov 23, 2021
Optical system with compensation lens
ASML NETHERLANDS BV2 citations71
US12451324B2Oct 21, 2025
Leveling sensor in multiple charged-particle beam inspection
ASML NETHERLANDS BV0 citations62
US12217927B2Feb 4, 2025
Beam manipulation of advanced charge controller module in a charged particle system
ASML NETHERLANDS BV0 citations62
US12125669B2Oct 22, 2024
Thermal-aided inspection by advanced charge controller module in a charged particle system
ASML NETHERLANDS BV0 citations62
US12072181B2Aug 27, 2024
Inspection apparatus and method
ASML NETHERLANDS BV0 citations62
US11815473B2Nov 14, 2023
Methods of inspecting samples with multiple beams of charged particles
ASML NETHERLANDS BV0 citations62
US12392732B2Aug 19, 2025
Multi-source illumination unit and method of operating the same
ASML NETHERLANDS BV0 citations61
US11808930B2Nov 7, 2023
Optical objective lens
ASML NETHERLANDS BV0 citations61
US11682538B2Jun 20, 2023
Optical system with compensation lens
ASML NETHERLANDS BV0 citations61
US11521826B2Dec 6, 2022
Optical height detection system
ASML NETHERLANDS BV0 citations61
US12368067B2Jul 22, 2025
Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer
ASML NETHERLANDS BV0 citations60
US12087542B2Sep 10, 2024
Image contrast enhancement in sample inspection
ASML NETHERLANDS BV0 citations60
US11164719B2Nov 2, 2021
Image contrast enhancement in sample inspection
ASML NETHERLANDS BV0 citations60
US12494342B2Dec 9, 2025
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV0 citations59
US11929232B2Mar 12, 2024
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV0 citations59
US12525900B2Jan 13, 2026
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12142451B2Nov 12, 2024
System for inspecting and grounding a mask in a charged particle system
ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11637512B2Apr 25, 2023
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11562884B2Jan 24, 2023
Current source apparatus and method
ASML NETHERLANDS BV0 citations57
US12051562B2Jul 30, 2024
Method, apparatus, and system for wafer grounding
ASML NETHERLANDS BV0 citations56
US11482399B2Oct 25, 2022
Method and apparatus for an advanced charged controller for wafer inspection
ASML NETHERLANDS BV0 citations56
US11581161B2Feb 14, 2023
Systems and methods for etching a substrate
ASML NETHERLANDS BV0 citations54
US12142456B2Nov 12, 2024
Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
ASML NETHERLANDS BV0 citations49
US12567558B2Mar 3, 2026
Systems and methods for pulsed voltage contrast detection and capture of charging dynamics
ASML NETHERLANDS BV0 citations48