P

Inventor

WANG YIXIANG

US34 patents
⚠️ This page may combine multiple inventors who share the name “WANG YIXIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

27 patents
US10784077B2Sep 22, 2020

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

ASML NETHERLANDS BV5 citations81
US11728131B2Aug 15, 2023

Thermal-aided inspection by advanced charge controller module in a charged particle system

ASML NETHERLANDS BV2 citations73
US11183360B2Nov 23, 2021

Optical system with compensation lens

ASML NETHERLANDS BV2 citations71
US12451324B2Oct 21, 2025

Leveling sensor in multiple charged-particle beam inspection

ASML NETHERLANDS BV0 citations62
US12217927B2Feb 4, 2025

Beam manipulation of advanced charge controller module in a charged particle system

ASML NETHERLANDS BV0 citations62
US12125669B2Oct 22, 2024

Thermal-aided inspection by advanced charge controller module in a charged particle system

ASML NETHERLANDS BV0 citations62
US12072181B2Aug 27, 2024

Inspection apparatus and method

ASML NETHERLANDS BV0 citations62
US11815473B2Nov 14, 2023

Methods of inspecting samples with multiple beams of charged particles

ASML NETHERLANDS BV0 citations62
US12392732B2Aug 19, 2025

Multi-source illumination unit and method of operating the same

ASML NETHERLANDS BV0 citations61
US11808930B2Nov 7, 2023

Optical objective lens

ASML NETHERLANDS BV0 citations61
US11682538B2Jun 20, 2023

Optical system with compensation lens

ASML NETHERLANDS BV0 citations61
US11521826B2Dec 6, 2022

Optical height detection system

ASML NETHERLANDS BV0 citations61
US12368067B2Jul 22, 2025

Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer

ASML NETHERLANDS BV0 citations60
US12087542B2Sep 10, 2024

Image contrast enhancement in sample inspection

ASML NETHERLANDS BV0 citations60
US11164719B2Nov 2, 2021

Image contrast enhancement in sample inspection

ASML NETHERLANDS BV0 citations60
US12494342B2Dec 9, 2025

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

ASML NETHERLANDS BV0 citations59
US11929232B2Mar 12, 2024

Systems and methods for charged particle flooding to enhance voltage contrast defect signal

ASML NETHERLANDS BV0 citations59
US12525900B2Jan 13, 2026

Object table comprising an electrostatic clamp

ASML NETHERLANDS BV0 citations57
US12142451B2Nov 12, 2024

System for inspecting and grounding a mask in a charged particle system

ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024

Object table comprising an electrostatic clamp

ASML NETHERLANDS BV0 citations57
US11637512B2Apr 25, 2023

Object table comprising an electrostatic clamp

ASML NETHERLANDS BV0 citations57
US11562884B2Jan 24, 2023

Current source apparatus and method

ASML NETHERLANDS BV0 citations57
US12051562B2Jul 30, 2024

Method, apparatus, and system for wafer grounding

ASML NETHERLANDS BV0 citations56
US11482399B2Oct 25, 2022

Method and apparatus for an advanced charged controller for wafer inspection

ASML NETHERLANDS BV0 citations56
US11581161B2Feb 14, 2023

Systems and methods for etching a substrate

ASML NETHERLANDS BV0 citations54
US12142456B2Nov 12, 2024

Self-differential confocal tilt sensor for measuring level variation in charged particle beam system

ASML NETHERLANDS BV0 citations49
US12567558B2Mar 3, 2026

Systems and methods for pulsed voltage contrast detection and capture of charging dynamics

ASML NETHERLANDS BV0 citations48

BLACK P2 USA INC

2 patents

WANG YIXIANG

1 patent

HERMES MICROVISION INC

1 patent

SHANGHAI ENABLE YOU TECH CO LTD

1 patent

BEIJING WEITEXING TECH CO LTD

1 patent

Baidu online network technology beijing co ltd

1 patent