Inventor
CHEN CHIA-YAO
US5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHIA-YAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS12525900B2Jan 13, 2026
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11637512B2Apr 25, 2023
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57