Inventor
KONUKI TADASHI
JP3 patents
Patents
3 patentsUS4719357AJan 12, 1988
Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment
CANON KK20 citations80
US4553834ANov 19, 1985
Mask aligner having a malfunction disposal device
CANON KK19 citations80
US4530587AJul 23, 1985
Step type mask aligner
CANON KK13 citations72