Inventor
HADJIZADEH-AMINI ZAHRA
US4 patents
Patents
4 patentsUS5013675AMay 7, 1991
Method of forming and removing polysilicon lightly doped drain spacers
ADVANCED MICRO DEVICES INC32 citations90
US5200351AApr 6, 1993
Method of fabricating field effect transistors having lightly doped drain regions
ADVANCED MICRO DEVICES INC52 citations89
US5010029AApr 23, 1991
Method of detecting the width of spacers and lightly doped drain regions
ADVANCED MICRO DEVICES INC10 citations71
US4978627ADec 18, 1990
Method of detecting the width of lightly doped drain regions
ADVANCED MICRO DEVICES INC14 citations71