Inventor

OYOBE HIROYUKI

JP3 patents

Patents

3 patents

US6152669ANov 28, 2000

Mechanical interface apparatus

SHINKO ELECTRIC CO LTD349 citations98

US5628604AMay 13, 1997

Conveying system

SHINKO ELECTRIC CO LTD91 citations95

US6186723B1Feb 13, 2001

Load port

SHINKO ELECTRIC CO LTD41 citations90