Inventor
KLEINHENZ RICHARD LEO
US4 patents
Patents
4 patentsUS5805494ASep 8, 1998
Trench capacitor structures
IBM44 citations95
US5770484AJun 23, 1998
Method of making silicon on insulator buried plate trench capacitor
IBM103 citations94
US6057188AMay 2, 2000
Trench capacitor structures
IBM38 citations91
US6528335B2Mar 4, 2003
Electrical method for assessing yield-limiting asperities in silicon-on-insulator wafers
IBM3 citations55