Inventor
JOZAKI TOMOHIDE
JP11 patents
Patents
11 patentsUS6063710AMay 16, 2000
Method and apparatus for dry etching with temperature control
SONY CORP61 citations96
US5981913ANov 9, 1999
Static electricity chuck and wafer stage
SONY CORP55 citations95
US5968273AOct 19, 1999
Wafer stage for manufacturing a semiconductor device
SONY CORP66 citations95
US6320737B1Nov 20, 2001
Electrostatic chucking device
SONY CORP15 citations92
US6174408B1Jan 16, 2001
Method and apparatus for dry etching
SONY CORP41 citations92
US6084763AJul 4, 2000
Method of holding wafer, method of removing wafer and electrostatic chucking device
SONY CORP26 citations92
US5431769AJul 11, 1995
Method and system for plasma treatment
SONY CORP37 citations89
US6235655B1May 22, 2001
Semiconductor manufacturing system and semiconductor manufacturing method
SONY CORP15 citations83
US7036673B2May 2, 2006
Lot management production method and product carrying container
SONY CORP7 citations73
US6204193B1Mar 20, 2001
Method for etching
SONY CORP14 citations73
US6655000B2Dec 2, 2003
Lot management production method and product carrying container
SONY CORP0 citations51