Inventor
NAKANISHI SHIRO
JP16 patents
Patents
16 patentsUS5721601AFeb 24, 1998
Display units having two insolating films and a planarizing film and process for producing the same
SANYO ELECTRIC CO186 citations97
US6613618B1Sep 2, 2003
Thin-film transistor and method of producing the same
SANYO ELECTRIC CO22 citations92
US6555419B2Apr 29, 2003
Thin film transistor and manufacturing method of thin film transistor
SANYO ELECTRIC CO21 citations92
US6548828B2Apr 15, 2003
Thin-film transistor and method of manufacturing thin-film transistor with tapered gate of 20 degrees or less
SANYO ELECTRIC CO23 citations92
US6265730B1Jul 24, 2001
Thin-film transistor and method of producing the same
SANYO ELECTRIC CO35 citations92
US6265247B1Jul 24, 2001
Thin-film transistor and manufacturing method for improved contact hole
SANYO ELECTRIC CO40 citations92
US6191452B1Feb 20, 2001
Thin film transistor having a stopper layer
SANYO ELECTRIC CO30 citations92
US5962916AOct 5, 1999
Thin-film transistor and manufacturing method thereof
SANYO ELECTRIC CO39 citations92
US6335232B1Jan 1, 2002
Method of manufacturing a thin film transistor
SANYO ELECTRIC CO28 citations90
US7163850B2Jan 16, 2007
Bottom gate-type thin-film transistor and method for manufacturing the same
SANYO ELECTRIC CO9 citations74
US6815272B2Nov 9, 2004
Bottom gate-type thin-film transistor and method for manufacturing the same
SANYO ELECTRIC CO7 citations74
US7045818B2May 16, 2006
Semiconductor device and method of manufacturing the same comprising thin film containing low concentration of hydrogen
SANYO ELECTRIC CO6 citations73
US6867075B2Mar 15, 2005
Manufacturing method of thin film transistor in which a total film thickness of silicon oxide films is defined
SANYO ELECTRIC CO6 citations73
US6103557AAug 15, 2000
Semiconductor device or thin-film transistor manufacturing apparatus and manufacturing method
SANYO ELECTRIC CO14 citations73
US6797651B2Sep 28, 2004
Method for manufacturing polycrystalline semiconductor layers and thin-film transistors and laser annealing apparatus
SANYO ELECTRIC CO6 citations71
US6750086B2Jun 15, 2004
Semiconductor device having a semiconductor thin film containing low concentration of unbound hydrogen atoms and method of manufacturing the same
SANYO ELECTRIC CO5 citations62