Inventor
CHOI JAE-HEUNG
KR5 patents
Patents
5 patentsUS6230080B1May 8, 2001
Monitoring system and monitoring method for a clean room regulating system
SAMSUNG ELECTRONICS CO LTD52 citations87
US6093229AJul 25, 2000
Drive checking system for fan filter units in clean room
SAMSUNG ELECTRONICS CO LTD19 citations82
US6098023AAug 1, 2000
Driving control system and monitoring device for fan filter unit in semiconductor clean room
SAMSUNG ELECTRONICS CO LTD8 citations72
US6082179AJul 4, 2000
Particle measuring device having funnel-shaped collector for semiconductor clean room applications
SAMSUNG ELECTRONICS CO LTD13 citations70
US6387333B2May 14, 2002
Gas purifying system
SAMSUNG ELECTRONICS CO LTD2 citations61