Inventor
TERASAWA CHIAKI
JP25 patents
Patents
25 patentsUS7239453B2Jul 3, 2007
Projection optical system and projection exposure apparatus
CANON KK33 citations96
US7092168B2Aug 15, 2006
Projection optical system and projection exposure apparatus
CANON KK36 citations96
US6995918B2Feb 7, 2006
Projection optical system and projection exposure apparatus
CANON KK60 citations96
US6829099B2Dec 7, 2004
Projection optical system and projection exposure apparatus
CANON KK55 citations96
US7075726B2Jul 11, 2006
Projection optical system and projection exposure apparatus
CANON KK34 citations92
US6995833B2Feb 7, 2006
Projection optical system, exposure apparatus, and device manufacturing method
CANON KK40 citations92
US6947210B2Sep 20, 2005
Catoptric projection optical system, exposure apparatus and device fabrication method using same
CANON KK30 citations92
US6084721AJul 4, 2000
Zoom lens
CANON KK24 citations92
US5760967AJun 2, 1998
Zoom lens
CANON KK31 citations92
US5136431AAug 4, 1992
Zoom lens of the internal focus type
CANON KK28 citations92
US5790316AAug 4, 1998
Zoom lens
CANON KK34 citations91
US7232233B2Jun 19, 2007
Catoptric reduction projection optical system and exposure apparatus using the same
CANON KK11 citations84
US6459534B1Oct 1, 2002
Projection optical system and projection exposure apparatus with the same, and device manufacturing method
CANON KK17 citations84
US7053986B2May 30, 2006
Projection optical system, exposure apparatus, and device manufacturing method
CANON KK6 citations74
US6867922B1Mar 15, 2005
Projection optical system and projection exposure apparatus using the same
CANON KK10 citations74
US6860610B2Mar 1, 2005
Reflection type projection optical system, exposure apparatus and device fabrication method using the same
CANON KK9 citations74
US6621555B1Sep 16, 2003
Projection optical system and projection exposure apparatus with the same, and device manufacturing method
CANON KK8 citations74
US5191475AMar 2, 1993
Zoom lens
CANON KK14 citations73
US5751497AMay 12, 1998
Zoom lens
CANON KK8 citations72
US5583700ADec 10, 1996
Zoom lens
CANON KK14 citations72
US7130018B2Oct 31, 2006
Catoptric projection optical system, exposure apparatus and device fabrication method
CANON KK5 citations63
US7268952B2Sep 11, 2007
Catadioptric projection system, and exposure apparatus having the same
CANON KK0 citations52
US7253971B2Aug 7, 2007
Catadioptric projection optical system and exposure apparatus having the same
CANON KK1 citations52
US7317571B2Jan 8, 2008
Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
CANON KK0 citations42
US7283294B2Oct 16, 2007
Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
CANON KK0 citations40