Inventor
PETERSON KEVIN L
US5 patents
⚠️ This page may combine multiple inventors who share the name “PETERSON KEVIN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
4 patentsUS6677253B2Jan 13, 2004
Carbon doped oxide deposition
INTEL CORP25 citations91
US6482754B1Nov 19, 2002
Method of forming a carbon doped oxide layer on a substrate
INTEL CORP29 citations91
US6680262B2Jan 20, 2004
Method of making a semiconductor device by converting a hydrophobic surface of a dielectric layer to a hydrophilic surface
INTEL CORP13 citations82
US7125583B2Oct 24, 2006
Chemical vapor deposition chamber pre-deposition treatment for improved carbon doped oxide thickness uniformity and throughput
INTEL CORP0 citations45