Inventor
SATO TAKEO
JP30 patents
⚠️ This page may combine multiple inventors who share the name “SATO TAKEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
17 patentsUS4861148AAug 29, 1989
Projection optical system for use in precise copy
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD146 citations96
US4844568AJul 4, 1989
Scanning type projection exposure system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD60 citations96
US4757354AJul 12, 1988
Projection optical system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD74 citations96
US5227838AJul 13, 1993
Exposure system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD31 citations92
US5062705ANov 5, 1991
Apparatus for evaluating a lens
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD43 citations92
US5053628AOct 1, 1991
Position signal producing apparatus for water alignment
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD31 citations92
US4948238AAug 14, 1990
Optical projection system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD38 citations92
US5748288AMay 5, 1998
Lighting assembly, exposure apparatus and exposure method employing the lighting assembly
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations74
US4870289ASep 26, 1989
Apparatus for controlling relation in position between a photomask and a wafer
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD20 citations74
US4654498AMar 31, 1987
Electrical discharge machining electrode for forming minute holes in a workpiece and electrical discharge machining apparatus employing such an electrode
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD11 citations74
US5231467AJul 27, 1993
Reflective alignment position signal producing apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations73
US5194744AMar 16, 1993
Compact reticle/wafer alignment system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations73
US4771157ASep 13, 1988
Electrical discharge machining apparatus for forming minute holes in a workpiece
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14 citations70
US5005938AApr 9, 1991
Optical wavelength convertical apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6 citations63
US5621822AApr 15, 1997
Method of detecting focus position of object from variable gray level image of object
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6 citations62
US5025168AJun 18, 1991
Alignment apparatus including three beams and three gratings
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62
US5155557AOct 13, 1992
Optical alignment detection apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations59